Micro-Electro-Mechanical Systems

-The Future Technology, but Today’s choice

Presented by… Vinayak HegdeGuide: Mrs. Priti Mishra

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AIM OF THE PRESENTATION

To introduce about the MEMS TECHNOLOGY

To introduce the MEMS Design process.

Applications, Advantages and Disadvantages of the MEMS.

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Introduction

What is MEMS Technology?MEMS technology is based on a number of tools and

methodologies, which are used to form small structures with dimensions in the micrometer scale

MEMS fabrication approach that conveys the advantages of miniaturization, multiple components, and microelectronics to the design and construction of integrated Electromechanical systems

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Introduction Conti…What are MEMS?

• Micro - Small size, microfabricated structures

• Electro - Electrical signal /control ( In / Out )

• Mechanical - Mechanical functionality (Out/ In )

• Systems - Structures, Devices, Systems controlsWhat is the size of MEMS?

They range in size from the sub micron level to the millimeter level, and there can be any number, from a few to millions, in a particular system.

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Building Blocks In MEMS

How MEMS are prepared? There are three basic building blocks in MEMS technology.

1. Deposition: The ability to deposit thin films of material on a substrate.

2. Lithography: To apply a patterned mask on top of

the films by photolithograpic imaging.

3. Etching: To etch the films selectively to the mask.

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MEMS Deposition TechnologyMEMS deposition technology can be classified in two groups:

1. Depositions that happen because of a chemical reaction: Chemical Vapor Deposition (CVD) Electrodeposition Epitaxy Thermal oxidation

2. Depositions that happen because of a physical reaction: Physical Vapor Deposition (PVD) Casting

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MEMS Lithography Technology

MEMS lithography technology can be classified in two groups:1. Pattern Transfer2. Lithographic Module

a. Dehydration bake and HMDS primeb. Resist spin/spray and Soft bakec. Alignment, Exposured. Post exposure bake and Hard bakee. Descum

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MEMS Etching TechnologyThere are two classes of etching process:

1. Wet etching: The material is dissolved when immersed in a chemical solution.

2. Dry etching: The material is sputtered or dissolved using reactive ions or a vapor phase etchant.

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MEMS Applications Micro-engines –Micro Reactors, Vibrating Wheel

Inertial Sensors –Virtual Reality Systems

Accelerometers –Airbag Accelerometer

Pressure Sensors –Air Pressure Sensors

Optical MEMS –Pill Camera

Fluidic MEMS -Cartridges for Printers

Bio MEMS -Blood Pressure Sensors

MEMS Memory Units -Flash Memory

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Advantages and Disadvantages

Minimize energy and materials use in manufacturing

Cost/performance advantages Improved reproducibility Improved accuracy and

reliability Increased selectivity and

sensitivity

Farm establishment requires huge investments

Micro-components are Costly compare to macro-components

Design includes very much complex procedures

Prior knowledge is needed to integrate MEMS devices

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ConclusionThe medical, wireless technology, biotechnology, computer, automotive and aerospace industries are only a few that will benefit greatly from MEMS.

This enabling technology promises to create entirely new categories of products

MEMS will be the indispensable factor for advancing technology in the 21st century

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My Next PresentationIncludes, details about..

Historical Background (MEMS Evolution)

Preparation Peocess of MEMS(Fabrication Process)

Interrelationship between MEMS and Nano(Future Scope of MEMS)

Applications of MEMS(Fields where MEMS Used)

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References for MEMSIEEE Explore http://ieeexplore.ieee.org/Xplore/DynWel.jspPDF Files http://www.scribd.com/mems/

Introduction to Microengineering http://www.dbanks.demon.co.uk/ueng/MEMS Clearinghouse http://www.memsnet.org/MEMS Exchange http://www.mems-exchange.org/

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